| E-beam | Electron Beam |
| E3 | Early Equipment Evaluation |
| EAPSM | Enbedded-attenuated Phase Shift Mask |
| EAROM | Electrically Alterable Read-only Memory |
| EASE | Equipment And Software Emulator |
| EBHT | Electron Beam High Throughput Lithography |
| EBIC | Electron Beam-induced Current |
| EBIT | Electron Beam Ion Trap |
| EBR | Edge Bead Removal |
| EBR | Etchback Rate |
| EBSD | Electron Backscattering Diffraction |
| EC | Engineering Change |
| EC | Equipment Controller |
| ECA | Engineering Capability Assessment |
| ECA | Elemental Criticality Analysis |
| ECAD | Electronic Computer-aided Design |
| ECAD | Engineering Computer-aided Design |
| ECAE | Electronic Computer-aided Engineering |
| ECAG | Equipment Class Application Guideline |
| ECC | Error Control Coding |
| ECD | Electron Capture Detector |
| ECD | Electrical Critical Dimension |
| ECD | Electrochemical Deposition |
| ECL | Emitter Coupled Logic |
| ECMD | Electrochemical-mechanical Deposition |
| ECN | Engineering Change Notice |
| ECO | Engineering Change Order |
| ECO | Edge Control Only |
| ECP | Electrochemical Plating |
| ECQB | Electrochemical Quartz Crystal Balance |
| ECR | Electron Cyclotron Resonance |
| ECTFE | Ethylene Chlorotrifluoroethylene |
| EDA | Electronic Design Automation |
| EDA | Equipment Data Acquisition |
| EDD | Earliest Due Date |
| EDI | Electronic Data Interchange |
| EDIF | Electronic Design Interchange Format |
| EDP | Electronic Data Processing |
| EDS | Energy-dispersive Spectroscopy |
| EDS | Electron-dispersive Spectroscopy |
| EDU | Equipment Dependent Uptime |
| EDX | Energy-dispersive X-ray |
| EDXA | Energy-dispersive X-ray Analysis |
| EEC | Equipment Engineering Capability |
| EEDF | Electron Energy Distribution Function |
| EELS | Electron Energy-loss Spectroscopy |
| EEPROM | Electrically Erasable Programmable Read Only Memory |
| EFEM | Equipment Front-end Module |
| EFO | Electronic Flame-off |
| EFOCS | Evanescent Fiber Optic Chemical Sensors |
| EFTIR | Emission Fourier Transform Infrared Spectroscopy |
| EFV | Excess Flow Valve |
| EG | Extrinsic Gettering |
| EGE | Ethylene Glycol Ethers |
| eHARP | Enhanced High Aspect Ratio Process |
| EHO | Estimated Hourly Output |
| EHS | Extremely Hazardous Substances |
| EI | Equipment Integration |
| EIA | Electronic Industries Association |
| EIC | Extracted Ion Count |
| EID | Equipment Interface Development |
| EID | Energy Isolation Device |
| EIP | Equipment Improvement Program |
| EIP | Equipment Improvement Project |
| EIS | Electrochemical Impedance Spectroscopy |
| EIS | Environmental Impact Study |
| EKF | Extended Kalman Filter |
| EL | Experience Level |
| EL | Exposure Latitude |
| ELAT | Exposure Latitute |
| ELF | Extremely Low Frequency |
| ELL | Entrance Loadlock |
| ELNES | Energy Loss Near Edge Structure |
| ELS | Extended Life Source |
| ELU | Environmental Loan Unit |
| EM | Enterprise Model |
| EM | Electromagnetic |
| EM | Electromigration |
| EMA | Effective Medium Approximation |
| EMA | Equipment Maturity Assessment |
| EMC | Electromagnetic Capability |
| EMC | Electromagnetic Compatibility |
| EMF | Electromagnetic Field |
| EMG | Electromigration |
| EMI | Electromagnetic Interference |
| EMMA | Electron Microscopy And Microanalysis |
| EMO | Emergency Off |
| EMP | Electromagnetic Pulse |
| EMR | Enter Move Request |
| EMU | Electromagnetic Unit |
| EOL | End-of-line |
| EOS | Electrical Overstress |
| EOT | End Of Transfer |
| EOT | Equivalent Oxide Thickness |
| EOY | End Of Year |
| EP | Extreme Pressure |
| EP | Electropolish |
| EP | Electroplating |
| EP | Ellipsometric Porosimetry |
| EPA | Environmental Protection Agency |
| EPL | Electron Projection Lithography |
| EPM | Equipment Performance Metrics |
| EPO | Emergency Power Off |
| EPR | Electron Paramagnetic Resonance |
| EPRI | Electrical Power Research Institute, Inc. |
| EPROM | Electrically Programmable Read-only Memory |
| EPSM | Embedded Phase Shift Mask |
| EPSS | Electronic Performance Support System |
| EPT | Equipment Performance Tracking |
| EPT | Endpoint |
| EQUIP C/I | Equipment Control And Integration |
| EQUIP RTC | Equipment Real-time Control |
| Er | Erbium |
| ERAM | Equipment Reliability, Availability, And Maintainability |
| ERC | Equivalent Release Concentration |
| ERC | Electrical Rule Check |
| ERD | Elastic Recoil Detection |
| ERG | Enhancement And Review Group |
| ERM | Enterprise Reference Model |
| ERN | External Recurrent Neural Network |
| ERP | Extended Range Pyrometer |
| ERS | Event Reporting Standard |
| ERT | Emergency Response Time |
| Es | Einsteinium |
| ES | Engineering Specification |
| ES | Expert System |
| ESA | Electrostatic Attraction |
| ESC | Electrostatic Chuck |
| ESCA | Electron Spectroscopy (for) Chemical Analysis |
| ESD | Electrostatic Discharge |
| ESED | Environmental Scattered Electron Detector |
| ESEM | Environmental Scanning Electron Microscope |
| ESH | Environment, Safety, And Health |
| ESL | Etchstop Layer |
| ESM | Electronic Service Manual |
| ESR | Electron Spin Resonance |
| ETAB | Executive Technical Advisory Board |
| ETQR | External Total Quality And Reliability |
| ETS | Engineering Test Stand |
| Eu | Europium |
| EUV | Extreme Ultraviolet |
| EUVL | Extreme Ultraviolet Lithography |
| EUVLLC | EUV Limited Liability Corporation |
| eV | Electronvolt |
| EVC | Equilibrium Vapor Concentration |
| EW | Electrolyzed Water |
| EWF | Effective Workfunction |
| EWMA | Exponentially Weighted Moving Average |
| EYE | Edinburgh Yield Estimator |